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Branson Plasma Asher

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  • Plasma Etch
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NFC Branson Plasma Asher
Equipment
Contact
Greg Book, PhD

AGS Reactive Ion Etcher (RIE) System

Located in our Cleanroom this system is capable of plasma etching and plasma cleaning substrates as large as 300mm (12") in diameter. It can etch silicon nitride, silicon dioxide, polysilicon, germanium and polymers. It can clean and remove photoresists and organic residues. 

  • Click here to see this instrument/facility cited in publication
  • Operating Instructions
  • AGS RIE Manuals
    • AGS Plasma System 900 Manual
    • Alcatel ACP-15G Dry Pump
    • AT-6 Automatic Matching Network
    • ENI 600W Backup RF Generator
    • Oerlikon TW250S Turbo Pump
    • Dressler Cesar 136 600W Supply
    • Bay Voltex Tempryte Chiller
    • MC2 Matching Network Controller
    • Pfeiffer Hi Pace 300C Turbo Brochure
    • Proteus Industries Flow Switch

Tags

  • Plasma Etch
Image
NFC AGS REACTIVE ION ETCHER (RIE) SYSTEM
Equipment
Contact
Greg Book, PhD
Attachments
ags_reactive_ion_etch_operating_instructions_uofa_omid_mahdavi.pdf
ags_plasma_system_900_manual.pdf
alcatel_acp-15g_dry_pump_manual.pdf
6200080000_at6_oper_man_v1_02.pdf
oem-6m-002_rf_power_supply_manual_rev_omid.pdf
oerlikon_tw250s_manual_rev_omid.pdf
dressler_cesar_136_manual_rev_omid.pdf
bayvoltex_tempryte_chiller_manual.pdf
6200070000_mc2_oper_man_v1_01.pdf
pfeiffer_hipaceturbobrochure.pdf
proteus_industries_flow_switch.pdf
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