Signatone 1160 Probe Station Microscope |
nanofab |
Kulicke & Soffa Wafer Saw |
nanofab |
Acid Wet Bench & Hood (Litho Area) |
nanofab |
Solvent Hood (Litho Area) |
nanofab |
Acid Wet Bench (Chase Area) |
nanofab |
Nikon Microscope(s) |
nanofab |
Omax Microscope |
nanofab |
LP-III Vapor Prime Oven |
nanofab |
Diener Parylene Coater |
nanofab |
Fiji ALD |
nanofab |
ECO-SNOW |
nanofab |
AIT 4-pt Probe |
nanofab |
Semitool Spin Rinse Dryer (SRD) |
nanofab |
Cary 5000 UV-Vis-NIR |
nanofab |
Verteq Spin Rinse Dryer (SRD) |
nanofab |
Filmetrics Profilm 3D |
nanofab |
Electron Beam Physical Vapor Deposition (PVD) |
nanofab |
Sentech Reflectometer |
nanofab |
Thermal Physical Vapor Deposition (PVD) |
nanofab |
Woollam m2000 Ellipsometer |
nanofab |
Tempress LPCVD Furnace System |
nanofab |
Thermal Oxidation & Non-Metallic Anneal Furnace |
nanofab |
Anneal Furnace |
nanofab |
Leica DMI6000B motorized inverted microscope |
opticalimaging |
Image Analysis computer workstation |
opticalimaging |